| Exploring the nonlinear piezoresistive effect of 4H-SiC and developing MEMS pressure sensors for extreme environments 期刊论文 MICROSYSTEMS & NANOENGINEERING, 2023, 卷号: 9, 期号: 1, 页码: 1-18 作者: Chen Wu; Xudong Fang; Qiang Kang; Ziyan Fang; Junxia Wu; Hongtao He; Dong Zhang; Libo Zhao; Bian Tian; Ryutaro Maeda; Zhuangde Jiang 收藏  |  浏览/下载:3/0  |  提交时间:2024/05/07 |