Exploring the nonlinear piezoresistive effect of 4H-SiC and developing MEMS pressure sensors for extreme environments

YIC-IR

	Exploring the nonlinear piezoresistive effect of 4H-SiC and developing MEMS pressure sensors for extreme environments
	Chen Wu 1; Xudong Fang 1; Qiang Kang 1; Ziyan Fang 1; Junxia Wu 1; Hongtao He 3; Dong Zhang 1; Libo Zhao 1; Bian Tian 1; Ryutaro Maeda 1; Zhuangde Jiang 1
发表期刊	MICROSYSTEMS & NANOENGINEERING
ISSN	2055-7434
	2023
卷号	9 期号:1 页码:1-18
英文摘要	Microelectromechanical system (MEMS) pressure sensors based on silicon are widely used and offer the benefits of miniaturization and high precision. However, they cannot easily withstand high temperatures exceeding 150?°C because of intrinsic material limits. Herein, we proposed and executed a systematic and full-process study of SiC-based MEMS pressure sensors that operate stably from ?50 to 300?°C. First, to explore the nonlinear piezoresistive effect, the temperature coefficient of resistance (TCR) values of 4H-SiC piezoresistors were obtained from ?50 to 500?°C. A conductivity variation model based on scattering theory was established to reveal the nonlinear variation mechanism. Then, a piezoresistive pressure sensor based on 4H-SiC was designed and fabricated. The sensor shows good output sensitivity (3.38?mV 2 SO 4 and NaOH solutions and its radiation tolerance under 5?W X-rays. Accordingly, the sensor developed in this work has high potential to measure pressure in high-temperature and extreme environments such as are faced in geothermal energy extraction, deep well drilling, aeroengines and gas turbines.
语种	英语
文献类型	期刊论文
条目标识符	http://ir.yic.ac.cn/handle/133337/34545
专题	中国科学院烟台海岸带研究所
作者单位	1.西安交通大学 2.中国科学院烟台海岸带研究所 3.HeBei Semiconductor Research Institute
推荐引用方式 GB/T 7714	Chen Wu,Xudong Fang,Qiang Kang,et al. Exploring the nonlinear piezoresistive effect of 4H-SiC and developing MEMS pressure sensors for extreme environments[J]. MICROSYSTEMS & NANOENGINEERING,2023,9(1):1-18.
APA	Chen Wu.,Xudong Fang.,Qiang Kang.,Ziyan Fang.,Junxia Wu.,...&Zhuangde Jiang.(2023).Exploring the nonlinear piezoresistive effect of 4H-SiC and developing MEMS pressure sensors for extreme environments.MICROSYSTEMS & NANOENGINEERING,9(1),1-18.
MLA	Chen Wu,et al."Exploring the nonlinear piezoresistive effect of 4H-SiC and developing MEMS pressure sensors for extreme environments".MICROSYSTEMS & NANOENGINEERING 9.1(2023):1-18.