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Exploring the nonlinear piezoresistive effect of 4H-SiC and developing MEMS pressure sensors for extreme environments 期刊论文
MICROSYSTEMS & NANOENGINEERING, 2023, 卷号: 9, 期号: 1, 页码: 1-18
作者:  Chen Wu;  Xudong Fang;  Qiang Kang;  Ziyan Fang;  Junxia Wu;  Hongtao He;  Dong Zhang;  Libo Zhao;  Bian Tian;  Ryutaro Maeda;  Zhuangde Jiang
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