Noninvasive fluid bubble detection based on capacitive micromachined ultrasonic transducers

YIC-IR

	Noninvasive fluid bubble detection based on capacitive micromachined ultrasonic transducers
	Jiawei Yuan 1; Zhikang Li 1; Qi Ma 1; Jie Li1 ; Zixuan Li 1; Yihe Zhao 1; Shaohui Qin 1; Xuan Shi 1; Libo Zhao 1; Ping Yang 1; Guoxi Luo 1; Xiaozhang Wang 1; Kwok Siong Teh 4; Zhuangde Jiang 1
发表期刊	MICROSYSTEMS & NANOENGINEERING
ISSN	2055-7434
卷号	9 期号:1
英文摘要	Ultrasonic fluid bubble detection is important in industrial controls, aerospace systems and clinical medicine because it can prevent fatal mechanical failures and threats to life. However, current ultrasonic technologies for bubble detection are based on conventional bulk PZT-based transducers, which suffer from large size, high power consumption and poor integration with ICs and thus are unable to implement real-time and long-term monitoring in tight physical spaces, such as in extracorporeal membrane oxygenation (ECMO) systems and dialysis machines or hydraulic systems in aircraft. This work highlights the prospect of capacitive micromachined ultrasonic transducers (CMUTs) in the aforementioned application situations based on the mechanism of received voltage variation caused by bubble-induced acoustic energy attenuation. The corresponding theories are established and well validated using finite element simulations. The fluid bubbles inside a pipe with a diameter as small as 8?mm are successfully measured using our fabricated CMUT chips with a resonant frequency of 1.1?MHz. The received voltage variation increases significantly with increasing bubble radii in the range of 0.5–2.5?mm. Further studies show that other factors, such as bubble positions, flow velocities, fluid medium types, pipe thicknesses and diameters, have negligible effects on fluid bubble measurement, demonstrating the feasibility and robustness of the CMUT-based ultrasonic bubble detection technique.
语种	英语
文献类型	期刊论文
条目标识符	http://ir.yic.ac.cn/handle/133337/34553
专题	中国科学院烟台海岸带研究所
作者单位	1.西安交通大学 2.中国科学院烟台海岸带研究所 3.Shaanxi University of Science and Technology, Xi’an 4.旧金山州立大学
推荐引用方式 GB/T 7714	Jiawei Yuan,Zhikang Li,Qi Ma,et al. Noninvasive fluid bubble detection based on capacitive micromachined ultrasonic transducers[J]. MICROSYSTEMS & NANOENGINEERING,9(1).
APA	Jiawei Yuan.,Zhikang Li.,Qi Ma.,Jie Li.,Zixuan Li.,...&Zhuangde Jiang.
MLA	Jiawei Yuan,et al."Noninvasive fluid bubble detection based on capacitive micromachined ultrasonic transducers".MICROSYSTEMS & NANOENGINEERING 9.1